What are Aluminum Oxide (Al₂O₃) Sputtering Targets?

Aluminum Oxide (Al₂O₃) Sputtering Targets, also known as alumina sputtering targets, are high-purity ceramic materials widely utilized in thin-film deposition technologies. Alumina sputtering targets offer exceptional dielectric strength, thermal stability, chemical resistance, and mechanical robustness, making them essential for electronic, optical, semiconductor, and coating industries.

Chemical Properties and CAS Number

• Material: Aluminum Oxide (Al₂O₃), Alumina

• CAS Number: 1344-28-1

• Molecular Weight: 101.96 g/mol

• Density: 3.95 – 3.98 g/cm³

• Melting Point: 2072 °C

• Boiling Point: 2980 °C

• Appearance: White, ceramic-like solid

• Purity Levels: Typically 99.9% – 99.999%

• Thermal Conductivity: 30 W/(m·K)

• Electrical Resistivity: High dielectric insulator (>10¹⁴ Ω·cm)

Applications of Aluminum Oxide (Al₂O₃) Sputtering Targets

• Semiconductor Industry:

  • Gate dielectric layers, insulating barriers, and passivation layers in semiconductor devices.

• Optical Coatings:

  • Antireflection (AR) coatings, transparent optical layers, protective films for lenses, mirrors, and sensors.

• Electronic Applications:

  • Insulating and dielectric thin-film layers in capacitors, sensors, thin-film transistors, and MEMS.

• Wear-Resistant Coatings:

  • Protective layers enhancing hardness, abrasion resistance, and durability of mechanical components and cutting tools.

• Photovoltaic Industry:

  • Protective and antireflective layers in solar cells, improving efficiency and device lifespan.

• Biomedical Applications:

  • Biocompatible coatings, bio-sensors, implantable medical devices.

Pricing of Aluminum Oxide (Al₂O₃) Sputtering Targets

Pricing depends significantly on purity, size, shape, and order quantity:

• Research & Lab-Scale Targets: $200 – $800 per piece

• Industrial & Large-Scale Targets: $1,000 – $3,500 per unit

• Custom Specifications: Pricing varies according to specific dimensions and purity.

Factors Influencing Pricing

• Purity (higher purity increases price)

• Size and thickness of targets (diameter and thickness variations)

• Shape and machining complexity (circular, rectangular, custom-shaped)

• Quantity and bulk-order discounts

• Specialized packaging and shipping methods