What are Silicon Dioxide (SiO₂) Sputtering Targets, Fused Quartz?

Silicon Dioxide (SiO₂) Sputtering Targets, also known as Fused Quartz Sputtering Targets, are high-purity materials used in thin-film deposition, optical coatings, semiconductor manufacturing, and electronics. These targets provide exceptional thermal stability, chemical purity, and optical transparency, making them ideal for advanced industrial applications.

Chemical Properties and CAS Number

• Chemical Formula: SiO₂
• CAS Number: 7631-86-9
• Appearance: White or transparent solid target
• Density: ~2.65 g/cm³ (varies with composition)
• Melting Point: ~1,713°C
• Solubility: Insoluble in water, resistant to most acids except hydrofluoric acid (HF)
• Chemical Stability: High resistance to oxidation, thermal expansion, and chemical degradation

Applications of Silicon Dioxide (SiO₂) Sputtering Targets

1. Thin-Film Deposition & Optical Coatings

Used in anti-reflective coatings, dielectric mirrors, and protective optical layers to enhance transparency and durability.

2. Semiconductor & Microelectronics

Applied in IC fabrication, MEMS devices, and transistor gate dielectrics to improve electrical insulation and performance.

3. Glass & Display Manufacturing

Utilized in LCD screens, OLED displays, and high-purity glass production for optical clarity and durability.

4. Energy & Photovoltaic Applications

Used in solar panels, energy-efficient coatings, and light-absorbing layers to optimize energy conversion efficiency.

5. Biomedical & Medical Devices

Employed in bio-compatible coatings, medical sensors, and imaging technologies due to its chemical inertness.

6. Aerospace & Automotive Industries

Applied in head-up displays (HUDs), optical sensors, and high-temperature-resistant coatings for enhanced functionality.

Pricing of Silicon Dioxide (SiO₂) Sputtering Targets

Prices vary based on purity, size, composition, and industry-specific applications:

• Industrial Grade: Typically ranges from $50 – $500 per piece
• High-Purity/Specialized Grade: Prices range from $1,000 – $5,000 per piece, used in advanced electronics, semiconductor, and optical applications.

Factors Influencing Silicon Dioxide Sputtering Target Prices

• Purity level (standard vs. ultra-high purity)
• Target dimensions and composition
• Processing method and manufacturing complexity
• Bulk order volume and market demand

Conclusion

Silicon Dioxide (SiO₂) Sputtering Targets (Fused Quartz) are essential materials for optical coatings, semiconductor processing, and high-performance electronics. Their exceptional thermal stability, chemical resistance, and optical properties make them ideal for thin-film deposition, energy applications, and display technologies. Pricing depends on purity, size, and intended use.